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[Talanta] Broadcasting photonic lab on a chip concept through a low cost manufacturing approach


A low cost fabrication process for photonic lab on a chip systems is here proposed. For the implementation of the masters suitable for cast molding fabrication, an inexpensive dry film photoresist, patternable using standard laboratory equipment, is benchmarked against standardized SU-8 masters obtained using UV lithography and systems manufacture in clean room facilities. Results show adequate system fabrication and a comparable performance of the photonic structures for absorbance/extinction measurements.

Isaac Rodríguez-Ruiza, , , Sébastien Teychenéb, , Nhat Van Phamb, Dimitri Radajewskib, Fabrice Lamadiea, Andreu Lloberac, Sophie Chartona a CEA, DEN, DMRC, SA2I, F-30207 Bagnols-sur-Cèze, France b Laboratoire de Génie Chimique, UMR 5503, 4 Allée Emile Monso, Toulouse, France c Institut de Microelectrònica de Barcelona–CNM/CSIC Campus UAB, Cerdanyola del Vallès, 08193 Barcelona, Spain Received 6 January 2017, Revised 3 April 2017, Accepted 4 April 2017, Available online 5 April 2017

Link: http://www.sciencedirect.com/science/article/pii/S0039914017304241

#05172017 #microfabrication #lithography

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