[Biomicrofluidics] Microfluidic devices fabricated using fast wafer-scale LED-lithography patterning
Current lithography approaches underpinning the fabrication of microfluidic devices rely on UV exposure of photoresists to define microstructures in these materials. Conventionally, this objective is achieved with gas discharge mercury lamps, which are capable of producing high intensity UV radiation. However, these sources are costly, have a comparatively short lifetime, necessitate regular calibration, and require significant time to warm up prior to exposure taking place. To address these limitations we exploit advances in solid state sources in the UV range and describe a fast and robust wafer-scale laboratory exposure system relying entirely on UV-Light emitting diode (UV-LED) illumination. As an illustration of the potential of this system for fast and low-cost microfluidic device production, we demonstrate the microfabrication of a 3D spray-drying microfluidic device and a 3D double junction microdroplet maker device.
Pavan K. Challa1, Tadas Kartanas1, Jérôme Charmet1,2,a), and Tuomas P. J. Knowles1,3,a) 1Department of Chemistry, University of Cambridge, Lensfield Road, Cambridge CB2 1EW, United Kingdom 2Institute of Digital Healthcare, WMG, University of Warwick, Coventry CV4 7AL, United Kingdom 3Cavendish Laboratory, Department of Physics, University of Cambridge, JJ Thomson Avenue, Cambridge CB3 0HE, United Kingdom a)Authors to whom correspondence should be addressed. Electronic addresses: J.Charmet@warwick.ac.uk and firstname.lastname@example.org
Biomicrofluidics 11, 014113 (2017); doi: http://dx.doi.org/10.1063/1.4976690