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[Applied Materials and Interfaces]Rollable Microfluidic Systems with Micrometer-Scale Bending Radius


Flexible microfluidic system is an essential component of wearable biosensors to handle body fluids. Parylene-based, thin-film microfluidic system is developed to achieve flexible microfluidics with microscale bending radius. A new molding and bonding technique is developed for parylene microchannel fabrication. Bonding with nano-adhesive layers deposited by initiated chemical vapor deposition (iCVD) enables the construction of microfluidic channels with short fabrication time and high bonding strength. High mechanical strength of parylene allows less channel deformation from internal pressure for thin-film parylene channel than bulk PDMS channel. At the same time, negligible channel sagging or collapse is observed during channel bending down to a few hundreds of micrometers due to stress relaxation by pre-stretch structure. The flexible parylene channels are also developed into a rollable microfluidic system. In a rollable microfluidics format, 2D parylene channels can be rolled around a capillary tubing working as an inlet to minimize device footprint. In addition, we show that creating reconfigurable 3D channel geometry with microscale bending radius can lead to tunable device function: tunable Dean-flow mixer is demonstrated using reconfigurable microscale 3D curved channel. Flexible parylene microfluidics with microscale bending radius is expected to provide important breakthrough for many fields including wearable biosensors and tunable 3D microfluidics.

Jihye Kim, Jae Bem You, Sung Min Nam, Sumin Seo, Sung Gap Im, and Wonhee Lee

ACS Appl. Mater. Interfaces, Just Accepted Manuscript

DOI: 10.1021/acsami.7b00741

Publication Date (Web): March 7, 2017

Copyright © 2017 American Chemical Society

Link: http://pubs.acs.org/doi/abs/10.1021/acsami.7b00741

#03112017 #biosensor #Parylene

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