• Microfluidics News Admin

[Conference]Triboelectrification based active sensor for liquid flow and bubble detetecting


Abstract:

This work presents a self-powered liquid flow and bubble detection sensor based on the effect of contact-electrification between liquid and solid interface. Charge is driven by the electrostatic induction to flow across outer load without power supply. Single-step fluorocarbon plasma treated PDMS with wrinkle pattern is employed to contact with liquid, which could enhance the electric performance and protect electrode. Interdigital electrode is utilized to detect the liquid flow direction and velocity, while the grounded branch makes it capable to detect bubble. This new-designed active sensor with the advantages of simple structure, stability, multifunction and scalability has a promising application in microfluidic sensor system.

Published in: Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on

Date of Conference: 22-26 Jan. 2017

Date Added to IEEE Xplore: 28 February 2017

DOI: 10.1109/MEMSYS.2017.7863540

Xiaoliang Cheng

National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, China

Liming Miao

National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, China

Haotian Chen

National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, China

Yu Song

National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, China

Zongming Su

National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, China

Xuexian Chen

National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, China

Huan Wang

School of Electronic and Computer Engineering, Peking University, Shenzhen 518055, China

Min Zhang

School of Electronic and Computer Engineering, Peking University, Shenzhen 518055, China

Haixia Zhang

National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, China

Link: http://ieeexplore.ieee.org/abstract/document/7863540/

#bubbledetection #sensor #MEMS #electrode #bubble

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