Abstract:

This paper reports a novel method of integrating magnetic nanoparticles (MNPs) with a MEMS inductor. The proposed method is based on the self-alignment of MNPs in response to a magnetic field generated by the integrated MEMS inductor itself. Because it is the natural tendency of MNPs to gravitate towards spots of maximum magnetic flux density, the alignment process results in an MNP distribution that is optimal for maximizing inductance. This new method of increasing the inductance of a MEMS inductor has been first suggested and demonstrated here. With only a 1wt% MNP mixture and a simple planar spiral inductor structure, the proposed method yielded a significant inductance gain of over 50%, which is comparable to the state of the art inductance gain achieved with MNPs by any method. In previous reports, this much gain was obtained with a 50wt% MNP mixture.

Published in: Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on MEMS

Date of Conference: 22-26 Jan. 2017

Date Added to IEEE Xplore: 28 February 2017

DOI: 10.1109/MEMSYS.2017.7863552

Jae-Shin Lee

School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, Korea

Seung-Deok Ko

Departmet of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA

Chang-Hoon Han

SK Hynix Inc., Icheon, Gyeonggi-do, Korea

Yong-Hoon Yoon

School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, Korea

Min-Ho Seo

School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, Korea

Jun-Bo Yoon

School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, Korea

Link: http://ieeexplore.ieee.org/abstract/document/7863552/

#MEMS #magneticnanoparticles #nanoparticle