• Microfluidics News Admin

[Conference]Fabrication strategy for micro soft robotics with semiconductor devices integration


Abstract:

We report a general method to fabricate miniaturized soft robots. For the first time, a freestanding microscale robotic finger/tentacle has been realized by heterogeneous integration of soft material polydimethylsiloxane (PDMS), liquid metal (LM), and silicon chips. Unlike the existing methods to make soft electronics or soft robotics, our technique of heterogeneous integration enables large-area parallel manufacturing of micro soft robotics armed with distributed crystalline silicon, deformable microfluidic channels, and flexible electrical interconnections, bridging the gap between the state-of-the-art soft electronics on a continuous film and soft robotics spanned in centimeters.

Published in: Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on MEMS

Date of Conference: 22-26 Jan. 2017

Date Added to IEEE Xplore: 28 February 2017

DOI: 10.1109/MEMSYS.2017.7863495

Tingyi Leo Liu

Department of Mechanical and Aerospace Engineering, University of California, Los Angeles (UCLA), USA

Ximiao Wen

Department of Mechanical and Aerospace Engineering, University of California, Los Angeles (UCLA), USA

Yu-Chun Kung

Department of Mechanical and Aerospace Engineering, University of California, Los Angeles (UCLA), USA

Pei-Yu Chi Cru

Department of Mechanical and Aerospace Engineering, University of California, Los Angeles (UCLA), USA

Link: http://ieeexplore.ieee.org/abstract/document/7863495/

#MEMS #SoftRobotics

Recent Posts

See All

© 2017 by "Microfluidics News".