Abstract:

We report a considerable improvement in the electrostatic actuation of silicon-based nano electrostatic drive (NED) structures [1] via the insertion of a liquid into the nanosystem. The dielectric liquid provides an insulating, high dielectric constant deformable medium in the electrode gaps that enhances the generated force per unit-applied volt performance. The study demonstrates that small volumes of liquids (microfluidics/nanofluidics) can be inserted into micro and nanoelectromechanical systems (MEMS/NEMS) to enhance systems' performances up to 2.75.

Published in: Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on MEMS

Date of Conference: 22-26 Jan. 2017

Date Added to IEEE Xplore: 28 February 2017

DOI: 10.1109/MEMSYS.2017.7863369

M. Gaudet

Fraunhofer Institute for Photonic Microsystems, Dresden, Germany

S. Uhlig

Fraunhofer Institute for Photonic Microsystems, Dresden, Germany

M. Stolz

Fraunhofer Institute for Photonic Microsystems, Dresden, Germany

S. Arscott

Institute of Electronics, Microelectronics and Nanotechnology, CNRS (UMR8520), Villeneuve d'Ascq, France

H. Conrad

Fraunhofer Institute for Photonic Microsystems, Dresden, Germany

S. Langa

Fraunhofer Institute for Photonic Microsystems, Dresden, Germany

B. Kaiser

Fraunhofer Institute for Photonic Microsystems, Dresden, Germany

H. Schenk

Fraunhofer Institute for Photonic Microsystems, Dresden, Germany

Link: http://ieeexplore.ieee.org/abstract/document/7863369/

#actuator #MEMS #NEMS