- Microfluidics News Admin
[Conference]Electrostatic bending actuators with a liquid filled nanometer scale gap
Abstract:
We report a considerable improvement in the electrostatic actuation of silicon-based nano electrostatic drive (NED) structures [1] via the insertion of a liquid into the nanosystem. The dielectric liquid provides an insulating, high dielectric constant deformable medium in the electrode gaps that enhances the generated force per unit-applied volt performance. The study demonstrates that small volumes of liquids (microfluidics/nanofluidics) can be inserted into micro and nanoelectromechanical systems (MEMS/NEMS) to enhance systems' performances up to 2.75.
Published in: Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on MEMS
Date of Conference: 22-26 Jan. 2017
Date Added to IEEE Xplore: 28 February 2017
DOI: 10.1109/MEMSYS.2017.7863369
M. Gaudet
Fraunhofer Institute for Photonic Microsystems, Dresden, Germany
S. Uhlig
Fraunhofer Institute for Photonic Microsystems, Dresden, Germany
M. Stolz
Fraunhofer Institute for Photonic Microsystems, Dresden, Germany
S. Arscott
Institute of Electronics, Microelectronics and Nanotechnology, CNRS (UMR8520), Villeneuve d'Ascq, France
H. Conrad
Fraunhofer Institute for Photonic Microsystems, Dresden, Germany
S. Langa
Fraunhofer Institute for Photonic Microsystems, Dresden, Germany
B. Kaiser
Fraunhofer Institute for Photonic Microsystems, Dresden, Germany
H. Schenk
Fraunhofer Institute for Photonic Microsystems, Dresden, Germany