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[Conference]A smart microfluidic system integrated with pressure sensors and flow sensor based on el


We report on a smart microfluidic system with multiple micro sensors integrated in the channel. It consists of a standard PDMS channel, and a smart substrate which has six bubble pressure sensors and a flow sensor all based on electrochemical impedance methods. This system will allow, for the first time, directly and simultaneously monitoring of multiple parameters in the channel of microfluidic systems, including the monitoring of local pressures, flow rate, particles, cells, and so on.

Conference: Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)

Date of Conference: 22-26 Jan. 2017

Date Added to IEEE Xplore: 28 February 2017

DOI: 10.1109/MEMSYS.2017.7863657

Longjun Tang ; Jingquan Liu ; Wen Hong ; Tao Wang ; Xiaolin Wang ; Xiang Chen ; Bin Yang ; Chunsheng Yang

National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Department of Micro/Nano-electronics, Shanghai Jiao Tong University, Shanghai, P.R. China

Link: http://ieeexplore.ieee.org/abstract/document/7863657/

#MEMS #sensor

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